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JIS H 0611:1994 (R2015)
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JIS H 0611:1994 (R2015)
Methods of measurement of thickness, thickness variation and bow for silicon waferMore info
This Japanese Industrial Standard specifies for measurements of thickness, taper and bow of single srystal silicon wafers.
| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2015-10-20 |
| ICS | 29.045 : Semiconducting materials
77.120.99 : Other non-ferrous metals and their alloys |
| Number of pages | 6 |
| Year | 1990 |
| Document history | |
| Country | Japan |
| Keyword | JIS 0611;0611;JIS H 0611-1994 |