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JIS H 0602:1995 (R2015)
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JIS H 0602:1995 (R2015)
Testing method of resistivity for silicon crystals and silicon wafers with four-point probeMore info
This Japanese Industrial Standard specifies the testing methods of resistivity for silicon crystals (hereafter referred to as the 'crystals') and silicon wafers (hereafter referred to as the 'wafers') with dc four-point probe. The range of resistivity able to be measured shall be 0.001 to 2000 ohm cm for p-type and 0.001 to 6000 ohm cm for n-type.
| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2015-10-20 |
| ICS | 29.045 : Semiconducting materials
77.120.99 : Other non-ferrous metals and their alloys |
| Number of pages | 14 |
| Replace | JIS H 0612 (1975) |
| Year | 1990 |
| Document history | JIS H 0602 (1995-11-01) |
| Country | Japan |
| Keyword | JIS 0602;0602;JIS H 0602-1995 |