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DIN 50450-1:1987-08
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DIN 50450-1:1987-08
Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of water impurity in hydrogen, oxygen, nitrogen, argon and helium by using a diphosphorus pentoxide cellMore info
The standard determines a test method for the determination of water impurity in carrier gases and doping gases (H2, O2, N2, Ar, He) used in the semi conductor technology.
| Author | DIN |
|---|---|
| Editor | DIN |
| Document type | Standard |
| Format | File |
| Cancellation date | |
| Confirmation date | |
| expiration_de_validite | |
| ICS | 29.045 : Semiconducting materials
71.100.20 : Gases for industrial application |
| Number of pages | 2 |
| Replace | DIN 50450-1 (1985-02) |
| Year | 1980 |
| Document history | DIN 50450-1 (1987-08) |
| Country | Germany |
| Keyword | DIN 50450;50450 |