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DIN 50450-3:1991-03

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DIN 50450-3:1991-03

Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of methane impurity in H2, O2, N2, Ar and He by using a flame ionization detector (FID)

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The standard should define the test method for determining the content of NH4 in the carrier and doping gases H2, O2, N2, Ar and He by using a FID.

Author DIN
Editor DIN
Document type Standard
Format File
Cancellation date
Confirmation date
expiration_de_validite
ICS 29.045 : Semiconducting materials
71.100.20 : Gases for industrial application
Number of pages 2
Replace DIN 50450-3 (1989-12)
Year 1990
Document history DIN 50450-3 (1991-03)
Country Germany
Keyword DIN 50450;50450