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DIN 50450-2:1991-03

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DIN 50450-2:1991-03

Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of oxygen impurity in N2, Ar, He, Ne and H2 by using a galvanic cell

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The standard should define the test method for determining the content of O2 in the carrier and doping gases N2, Ar, He, Ne and H2.

Author DIN
Editor DIN
Document type Standard
Format File
Cancellation date
Confirmation date
expiration_de_validite
ICS 29.045 : Semiconducting materials
71.100.20 : Gases for industrial application
Number of pages 2
Replace DIN 50450-2 (1989-12)
Year 1990
Document history DIN 50450-2 (1991-03)
Country Germany
Keyword DIN 50450;50450