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DIN 50450-4:1993-09
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DIN 50450-4:1993-09
Testing of materials for semiconductor technology; determination of impurities in carrier gases and dopant gases; determination of C1-C3-hydrocarbons in nitrogen by gas-chromatographyMore info
This document specifies a method for the determination of the volume part of C1-C3-hydrocarbons in nitrogen in the range between 0,2 and 10 µl/l.
| Author | DIN |
|---|---|
| Editor | DIN |
| Document type | Standard |
| Format | File |
| Cancellation date | |
| Confirmation date | |
| expiration_de_validite | |
| ICS | 29.045 : Semiconducting materials
71.100.20 : Gases for industrial application |
| Number of pages | 2 |
| Replace | DIN 50450-4 (1992-01) |
| Year | 1990 |
| Document history | DIN 50450-4 (1993-09) |
| Country | Germany |
| Keyword | DIN 50450;50450 |