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DIN 50452-3:1995-10
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DIN 50452-3:1995-10
Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 3: Calibration of optical particle countersMore info
The document describes methods for the determination of measuring deviations of particle sizes, particle concentrations and the resolving capacity of optical particle counters based upon measuring of the laser light-scattering.
| Author | DIN |
|---|---|
| Editor | DIN |
| Document type | Standard |
| Format | File |
| Cancellation date | |
| Confirmation date | |
| expiration_de_validite | |
| ICS | 29.045 : Semiconducting materials
|
| Number of pages | 6 |
| Replace | DIN 50452-3 (1993-08) |
| Year | 1990 |
| Document history | DIN 50452-3 (1995-10) |
| Country | Germany |
| Keyword | DIN 50452;50452 |