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DIN 50452-1:1995-11
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DIN 50452-1:1995-11
Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 1: Microscopic determination of particlesMore info
This method cover the determination of the concentration of particulate matter contamination from liquids isolated on a membrane filter by microscopic counting. The scope is limited to sizing particles of 5 µm and more.
| Author | DIN |
|---|---|
| Editor | DIN |
| Document type | Standard |
| Format | File |
| Cancellation date | |
| Confirmation date | |
| expiration_de_validite | |
| ICS | 29.045 : Semiconducting materials
|
| Number of pages | 4 |
| Replace | DIN 50452-1 (1988-09) |
| Year | 1990 |
| Document history | DIN 50452-1 (1995-11) |
| Country | Germany |
| Keyword | DIN 50452;50452 |