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JIS K 0132:1997 (R2016)
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JIS K 0132:1997 (R2016)
General rules for scanning electron microscopyMore info
This Japanese Industrial Standard specifies general matters which are needed when the morphological observation and analysis of micro spot on specimen surface are carried out mainly owing to the secondary electrons using a scanning electron microscope.
| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2016-10-20 |
| ICS | 37.020 : Optical equipment
|
| Number of pages | 44 |
| Year | 1990 |
| Document history | |
| Country | Japan |
| Keyword | JIS 0132;0132;JIS K 0132-1997 |