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JIS R 1637:1998 (R2017)

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JIS R 1637:1998 (R2017)

Test method for resistivity of conductive fine ceramic thin films with a four-point probe array

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This Japanese Industrial Standard specifies the test method for resistivity of the conductive fine ceramic thin films with a four-point array. The applicable range of the resistivity shall be 1*10-5 ohm cm, and film thickness shall be maximum 500 mum.

Author JSA
Editor JSA
Document type Standard
Format File
Confirmation date 2017-10-20
ICS 81.060.30 : Advanced ceramics
Number of pages 7
Year 1990
Document history
Country Japan
Keyword JIS 1637;1637;JIS R 1637-1998