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This Japanese Industrial Standard specifies the test method for resistivity of the conductive fine ceramic thin films with a four-point array. The applicable range of the resistivity shall be 1*10-5 ohm cm, and film thickness shall be maximum 500 mum.
| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2017-10-20 |
| ICS | 81.060.30 : Advanced ceramics
|
| Number of pages | 7 |
| Year | 1990 |
| Document history | |
| Country | Japan |
| Keyword | JIS 1637;1637;JIS R 1637-1998 |