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JIS R 1636:1998 (R2017)
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JIS R 1636:1998 (R2017)
Test method for thickness of fine ceramic thin films - Film thickness by contact probe profilometerMore info
This Japanese Industrial Standard specifies the test method for thickness of fine ceramic thin films by a contact probe profilometer. The applicable range of the film thickness shall be 10 nm to 10000 nm.
| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2017-10-20 |
| ICS | 81.060.30 : Advanced ceramics
|
| Number of pages | 10 |
| Year | 1990 |
| Document history | |
| Country | Japan |
| Keyword | JIS 1636;1636;JIS R 1636-1998 |