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DIN 32564-3:2004-05

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DIN 32564-3:2004-05

Production equipment for micro-systems - Terms and definitions - Part 3: Handling, storage and transport

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This document defines terms, which relate to the handling, storage and transport of micro-systems. Its purpose is to ease the communication about technical issues by harmonization of the vocabulary.

Author DIN
Editor DIN
Document type Standard
Format File
Cancellation date
Confirmation date
expiration_de_validite
ICS 01.040.39 : Precision mechanics. Jewellery (Vocabularies)
39.020 : Precision mechanics
Number of pages 5
Replace DIN 32564-3 (2003-06)
Year 2004
Document history DIN 32564-3 (2004-05)
Country Germany
Keyword DIN 32564;32564