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DIN 32564-1:2004-05
New product
DIN 32564-1:2004-05
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technologyMore info
This document defines general terms, which relate to the production of micro-systems. Its purpose is to ease the communication about technical issues by harmonization of the vocabulary.
| Author | DIN |
|---|---|
| Editor | DIN |
| Document type | Standard |
| Format | File |
| Cancellation date | |
| Confirmation date | |
| expiration_de_validite | |
| ICS | 01.040.39 : Precision mechanics. Jewellery (Vocabularies)
39.020 : Precision mechanics |
| Number of pages | 6 |
| Replace | DIN 32564-1 (2003-06) |
| Year | 2004 |
| Document history | DIN 32564-1 (2004-05) |
| Country | Germany |
| Keyword | DIN 32564;32564 |