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DIN 50451-4:2007-02

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DIN 50451-4:2007-02

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)

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This Standard specifies a test method for the determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS). The method is applicable to mass fractions of elements from 10 ng/kg to 1000 ng/kg.

Author DIN
Editor DIN
Document type Standard
Format File
Cancellation date
Confirmation date
expiration_de_validite
ICS 29.045 : Semiconducting materials
Number of pages 13
Replace DIN 50451-4 (2005-05)
Year 2007
Document history DIN 50451-4 (2007-02)
Country Germany
Keyword DIN 50451;50451