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This technical specification specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination.
| Author | DIN |
|---|---|
| Editor | DIN |
| Document type | Standard |
| Format | File |
| ICS | 31.020 : Electronic components in general
07.120 : Nanotechnologies |
| Number of pages | 38 |
| Replace | DIN IEC 62622 (2011-07) |
| Cross references | IEC/TS 62622 (2012-10), IDT
|
| Year | 2014 |
| Document history | DIN IEC/TS 62622 (2014-09) |
| Country | Germany |
| Keyword | 62622 |