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DIN IEC/TS 62622 DIN SPEC 42622:2014-09

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DIN IEC/TS 62622 DIN SPEC 42622:2014-09

Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings (IEC/TS 62622:2012)

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This technical specification specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination.

Author DIN
Editor DIN
Document type Standard
Format File
ICS 31.020 : Electronic components in general
07.120 : Nanotechnologies
Number of pages 38
Replace DIN IEC 62622 (2011-07)
Cross references IEC/TS 62622 (2012-10), IDT
Year 2014
Document history DIN IEC/TS 62622 (2014-09)
Country Germany
Keyword 62622