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DIN 32567-2:2014-10
New product
DIN 32567-2:2014-10
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile proceduresMore info
This document describes specimens for topographic layer thickness measurements to study the systematic effects that occur when layer and substrate have different physical properties.
| Author | DIN |
|---|---|
| Editor | DIN |
| Document type | Standard |
| Format | File |
| ICS | 39.020 : Precision mechanics
|
| Number of pages | 13 |
| Replace | DIN 32567-2 (2012-07) |
| Year | 2014 |
| Document history | DIN 32567-2 (2014-10) |
| Country | Germany |
| Keyword | DIN 32567;32567 |