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DIN 32567-4:2015-06
New product
DIN 32567-4:2015-06
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 4: Specimen for optical proceduresMore info
This document specifies methods for optical topographic measurement of the layer thickness of layer systems, with different mechanical properties of layer and substrate, in order to determine systematic deviations of the measured layer thickness.
| Author | DIN |
|---|---|
| Editor | DIN |
| Document type | Standard |
| Format | File |
| ICS | 39.020 : Precision mechanics
|
| Number of pages | 13 |
| Replace | DIN 32567-4 (2014-11) |
| Year | 2015 |
| Document history | DIN 32567-4 (2015-06) |
| Country | Germany |
| Keyword | DIN 32567;32567 |