Cart
0
Product
Products
(empty)
No products
To be determined
Shipping
$0.00
Total
Product successfully added to your shopping cart
Quantity
Total
There are 0 items in your cart.
There is 1 item in your cart.
Total products
Total shipping
To be determined
Total
Sale!
View larger
View larger
DIN 32567-5:2015-06
New product
DIN 32567-5:2015-06
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devicesMore info
This document specifies methods for optical topographic measurement of the layer thickness of layer systems, with different mechanical properties of layer and substrate, in order to determine systematic deviations of the measured layer thickness.
| Author | DIN |
|---|---|
| Editor | DIN |
| Document type | Standard |
| Format | File |
| ICS | 39.020 : Precision mechanics
|
| Number of pages | 18 |
| Replace | DIN 32567-5 (2014-11) |
| Year | 2015 |
| Document history | DIN 32567-5 (2015-06) |
| Country | Germany |
| Keyword | DIN 32567;32567 |