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DIN 50989-1:2018-03

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DIN 50989-1:2018-03

Ellipsometry - Part 1: Principles; Text in German and English

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This standard deals with the ellipsometry, a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses, in the range of at-line production control, quality assurance and material development.

Author DIN
Editor DIN
Document type Standard
Format File
ICS 19.100 : Non-destructive testing
Number of pages 35
Replace DIN 50989-1 (2017-04)
Year 2018
Document history DIN 50989-1 (2018-03)
Country Germany
Keyword DIN 50989;50989