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DIN 50989-1:2018-03
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DIN 50989-1:2018-03
Ellipsometry - Part 1: Principles; Text in German and EnglishMore info
This standard deals with the ellipsometry, a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses, in the range of at-line production control, quality assurance and material development.
| Author | DIN |
|---|---|
| Editor | DIN |
| Document type | Standard |
| Format | File |
| ICS | 19.100 : Non-destructive testing
|
| Number of pages | 35 |
| Replace | DIN 50989-1 (2017-04) |
| Year | 2018 |
| Document history | DIN 50989-1 (2018-03) |
| Country | Germany |
| Keyword | DIN 50989;50989 |