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DIN 50451-7:2018-04

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DIN 50451-7:2018-04

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 7: Determination of 31 elements in high-purity hydrochloric acid by ICP-MS

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This document specifies methods of testing hydrochloric acid for small traces of 31 elements using the inductively coupled plasma mass spectrometry (ICP-MS).

Author DIN
Editor DIN
Document type Standard
Format File
ICS 29.045 : Semiconducting materials
Number of pages 14
Replace DIN 50451-7 (2017-09)
Year 2018
Document history DIN 50451-7 (2018-04)
Country Germany
Keyword DIN 50451;50451