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JIS K 0143:2000 (R2014)

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JIS K 0143:2000 (R2014)

Surface chemical analysis - Secondary ion mass spectrometry - Determination of boron atomic concentration in silicon using uniformly doped materials

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Author JSA
Editor JSA
Document type Standard
Format File
Confirmation date 2014-10-20
ICS 71.040.40 : Chemical analysis
Number of pages 21
Replace JIS K 0143 (2000-03)
Cross references ISO 14237 (2000-02), IDT
Year 2000
Document history JIS K 0143 (2000-07-20)
Country Japan
Keyword JIS 0143;0143