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JIS K 0146:2002 (R2016)

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JIS K 0146:2002 (R2016)

Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials

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Author JSA
Editor JSA
Document type Standard
Format File
Confirmation date 2016-10-20
ICS 71.040.40 : Chemical analysis
Number of pages 20
Replace JIS K 0146 (2001-11)
Cross references ISO 14606 (2000-10), IDT
Year 2002
Document history JIS K 0146 (2002-03-20)
Country Japan
Keyword JIS 0146;0146