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JIS B 9917-5:2008 (R2013)
New product
JIS B 9917-5:2008 (R2013)
Maintenance and cleaning in cleanroom operationsMore info
| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2013-10-21 |
| ICS | 13.040.35 : Cleanrooms and associated controlled environments
|
| Number of pages | 48 |
| Cross references | ISO 14644-5 (2004-08), MOD |
| Year | 2008 |
| Document history | |
| Country | Japan |
| Keyword | JIS B 9917;JIS 9917;9917 |