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JIS B 9917-3:2009 (R2013)

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JIS B 9917-3:2009 (R2013)

Cleanrooms and associated controlled environments - Part 3: Test methods

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This Japanese Industrial Standard specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of clean rooms and clean zones.

Author JSA
Editor JSA
Document type Standard
Format File
Confirmation date 2013-10-21
ICS 13.040.35 : Cleanrooms and associated controlled environments
Number of pages 70
Cross references ISO 14644-3 (2005-12), MOD
Year 2009
Document history
Country Japan
Keyword JIS B 9917;JIS 9917;9917