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This Japanese Industrial Standard specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of clean rooms and clean zones.
Author | JSA |
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Editor | JSA |
Document type | Standard |
Format | File |
Confirmation date | 2013-10-21 |
ICS | 13.040.35 : Cleanrooms and associated controlled environments
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Number of pages | 70 |
Cross references | ISO 14644-3 (2005-12), MOD |
Year | 2009 |
Document history | |
Country | Japan |
Keyword | JIS B 9917;JIS 9917;9917 |