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JIS K 0160:2009 (R2014)
New product
JIS K 0160:2009 (R2014)
Surface chemical analysis - Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopyMore info
| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2014-10-20 |
| ICS | 71.040.50 : Physicochemical methods of analysis
|
| Number of pages | 24 |
| Cross references | ISO 17331 (2004-05), IDT |
| Year | 2009 |
| Document history | |
| Country | Japan |
| Keyword | JIS 0160;0160 |