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This Japanese Industrial Standard specifies the measurement methods for performance characteristics of turbomolecular pumps.
Author | JSA |
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Editor | JSA |
Document type | Standard |
Format | File |
Confirmation date | 2014-10-20 |
ICS | 23.160 : Vacuum technology
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Number of pages | 18 |
Cross references | ISO 5302 (2003-07), MOD |
Year | 2009 |
Document history | |
Country | Japan |
Keyword | JIS 8328;8328 |