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This Japanese Industrial Standard specifies the measurement methods for performance characteristics of turbomolecular pumps.
| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2014-10-20 |
| ICS | 23.160 : Vacuum technology
|
| Number of pages | 18 |
| Cross references | ISO 5302 (2003-07), MOD |
| Year | 2009 |
| Document history | |
| Country | Japan |
| Keyword | JIS 8328;8328 |