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JIS K 0163:2010 (R2015)

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JIS K 0163:2010 (R2015)

Surface chemical analysis - Secondary-ion mass spectrometry - Determination of relative sensitivity factors from ion-implanted reference materials

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Author JSA
Editor JSA
Document type Standard
Format File
Confirmation date 2015-10-20
ICS 71.040.40 : Chemical analysis
Number of pages 6
Cross references ISO 18114 (2003-04), IDT
Year 2010
Document history
Country Japan
Keyword JIS 0163;0163