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JIS B 9917-8:2010 (R2015)

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JIS B 9917-8:2010 (R2015)

Cleanroom and associated controlled environments - Part 8: Classification of airborne molecular contamination

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Author JSA
Editor JSA
Document type Standard
Format File
Confirmation date 2015-10-20
ICS 13.040.35 : Cleanrooms and associated controlled environments
Number of pages 26
Cross references ISO 14644-8 (2006-08), MOD
Year 2010
Document history
Country Japan
Keyword JIS B 9917;JIS 9917;9917