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| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| ICS | 23.160 : Vacuum technology
|
| Number of pages | 36 |
| Cross references | ISO 21360-1 (2012-04), MOD |
| Year | 2015 |
| Document history | |
| Country | Japan |
| Keyword | JIS B 8329;JIS 8329;8329 |